Pagpapakilala ng wafer carrier
PRODUCT CTAGORY
▶Wafer Carrier System para sa Proseso ng PECVD at TALOX
• PECVD at TALOX Graphite Boat (M4~M12)
• Vertical SM-Boat (M4, M6)
• Implant at shower Graphite Part (M4~M6)
• C/C Tray at Ceramic Coating
• Metal RIE-Tray at Ceramic Coating
• Vacuum Sealing : O-Ring at SQ-Ring
▶Proseso ng Paglipat ng Texturing at Wet Etching
• LSC H-Carrier o cassette (M4~M12)
• LSC V-Carrier o cassette (M4~M12)
• ASC Carrier o cassette (M4, M6)
• W/F Carrier at Storage Box (M4~M12)
• Serye ng Transport Wheel (Roller).
▶Solar Cell Carrier at Metal Carrier
• TRC Carrier o cassette (M4~M12)
• Magazine (may BELT)
GRAPHITE BOAT (H-Type)
19P6-216CT (WF M4~M12)
GRAPHITE BOAT (H-Type)
21P6-240CT WF M4~M12)
GRAPHITE BOAT (H-Type)
23P7-308CT(W/F M4~M12)
GRAPHITE BOAT (H-Type)
22P/7-294TP (W/F M4~M12)
GRAPHITE BOAT (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER at STORAGE BOX (~M12)
C/C TRAY o CARRIER( M4~M10)
C/C TRAY o CARRIER( M4~M10)
VERTICAL BOAT (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System para sa Proseso ng PECVD
▶ GRAPHITE BOAT (CT-Designed) M10/M12 na Proseso
• SPECIAL DESIGN CONCEPT
▶ GRAPHITE BOAT (CT-Designed) M4/M6 na Proseso
▶ Mga Bahagi ng Accessory ng Bangka
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161.7mm, 166mm WAFER
Solar Cell Carrier at Metal TRC Carrier
URI: Automation
LAKI NG WAFER : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
PAGGAMIT : Dala (Cassette)
CAPACITY : 100 sheet
PITCH : 4.76MM/5.953mm/6.35mm
DIMENSYON : Tinatayang 559×220×220MM
Tinatayang 712×260×260MM
ADVANTAGE : Atmosphere
MATERIAL: FLAME, SIDE BAR-Aluminum (anodizing)
SIDE PLATE-POM (Antistatic)
Cover ng ibabang bar-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
SHOWER PLATE & IMPLANT, CARRIER
